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GLR Precision – Pioneer vibration control for sub-nanometer semiconductor manufacturing.

Passive damping falls short on low-frequency and shock-induced disturbances; GreLanor’s active isolation systems cut vibration transmission and suppress oscillation in real time, boosting yield and throughput.

Active platforms: SFN (compound spring), SFT (air), FSD (shock-resistant), miniPAD (integrated).

Trusted in semiconductor fabs and precision labs worldwide.

The SFT Series Model D Vibration Damper features highly competitive active vibration damping performance and strong anti-shock capabilities, meeting the performance requirements of back-end packaging and high-yield wafer inspection.

Product Model:SFT080D

Scenario: Metrology equipment of a leading domestic semiconductor manufacturer

Vibration transmissibility: As shown in the figure

Maximum moving mass:50kg

Motion acceleration:8m/s2

Settling time:100ms

Displacement Fluctuation: Positioning Control Error of the Stage±10nm

http://www.glroadprecision.com
Wuhan Glory Road Precision Technology Co., Ltd.

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