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GLR Precision – Pioneer vibration control for sub-nanometer semiconductor manufacturing.
Passive damping falls short on low-frequency and shock-induced disturbances; GreLanor’s active isolation systems cut vibration transmission and suppress oscillation in real time, boosting yield and throughput.
Active platforms: SFN (compound spring), SFT (air), FSD (shock-resistant), miniPAD (integrated).
Trusted in semiconductor fabs and precision labs worldwide.
The SFT Series Model D Vibration Damper features highly competitive active vibration damping performance and strong anti-shock capabilities, meeting the performance requirements of back-end packaging and high-yield wafer inspection.
Product Model:SFT080D
Scenario: Metrology equipment of a leading domestic semiconductor manufacturer
Vibration transmissibility: As shown in the figure
Maximum moving mass:50kg
Motion acceleration:8m/s2
Settling time:100ms
Displacement Fluctuation: Positioning Control Error of the Stage±10nm
http://www.glroadprecision.com
Wuhan Glory Road Precision Technology Co., Ltd.
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